Jane P. Chang
Jane Pei-chen Chang (born 1967) is a Taiwanese-American chemical engineer and materials scientist known for her research developing advanced atomic layer deposition (ALD) and etching techniques. Her research focuses on creating thin films and coatings with precise properties for use in microelectronics, energy devices, and other advanced materials applications. Provided by Wikipedia-
1by Kos Galatsis, Charles Ahn, Ilya Krivorotov, Philip Kim, Roger Lake, Kang L. Wang, Jane P. ChangGet full text
Published 2015-01-01
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