Contamination Particles and Plasma Etching Behavior of Atmospheric Plasma Sprayed Y₂O₃ and YF₃ Coatings under NF₃ Plasma

by Je-Boem Song, Jin-Tae Kim, Seong-Geun Oh, Ju-Young Yun
Published 2019-02-01

Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

by Jong-Ki An, Eunmi Choi, Seob Shim, Hayeong Kim, Goru Kang, Ju-Young Yun
Published 2020-09-01

Contamination Particle Behavior of Aerosol Deposited Y₂O₃ and YF₃ Coatings under NF₃ Plasma

by Je-Boem Song, Eunmi Choi, Seong-Geun Oh, Jin-Tae Kim, Ju-Young Yun
Published 2019-05-01

Structural, Optical and Electrical Properties of HfO₂ Thin Films Deposited at Low-Temperature Using Plasma-Enhanced Atomic Layer Deposition

by Kyoung-Mun Kim, Jin Sub Jang, Soon-Gil Yoon, Ju-Young Yun, Nak-Kwan Chung
Published 2020-04-01

Improvement of corrosion properties of plasma in an aluminum alloy 6061-T6 by phytic acid anodization temperature

by Minjoong Kim, Eunmi Choi, Jongho So, Jae-Soo Shin, Chin-Wook Chung, Seon-Jeong Maeng, Ju-Young Yun
Published 2021-03-01

Improvement of Plasma Resistance of Anodic Aluminum-Oxide Film in Sulfuric Acid Containing Cerium(IV) Ion

by Jongho So, Eunmi Choi, Jin-Tae Kim, Jae-Soo Shin, Je-Boem Song, Minjoong Kim, Chin-Wook Chung, Ju-Young Yun
Published 2020-01-01

Effect of Growth Temperature on the Structural and Electrical Properties of ZrO2 Films Fabricated by Atomic Layer Deposition Using a CpZr[N(CH3)2]3/C7H8 Cocktail Precursor

by Jong-Ki An, Nak-Kwan Chung, Jin-Tae Kim, Sung-Ho Hahm, Geunsu Lee, Sung Bo Lee, Taehoon Lee, In-Sung Park, Ju-Young Yun
Published 2018-03-01