Air-Based Contactless Wafer Precision Positioning System

by Rico Hooijschuur, Niranjan Saikumar, S. Hassan HosseinNia, Ron A. J. van Ostayen
Published 2021-08-01

Design considerations for ferrofluid pressure bearing pads

by Stefan W.M. van den Toorn, Jo W. Spronck, Ron A.J. van Ostayen, Stefan G.E. Lampaert
Published 2021-06-01