5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range

by Schattenburg, Mark Lee, Chang, Chih-Hao, Ahn, Minseung, Padmore, Howard A., Yashchuk, Valeriy V., Gullikson, Eric M., Salmassi, Farhad, Cambie, Rossana, Anderson, Erik H., Voronov, Dmitriy L., Heilmann, Ralf K
Published 2010