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Zhezheng Zhu
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Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor
by
Wenhan Chang
,
Lingmeng Yang
,
Zhezheng
Zhu
,
Zhenchuan Yang
,
Yilong Hao
,
Chengchen Gao
Published 2021-06-01
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