Selective detection of naphthalene with nanostructured WO<sub>3</sub> gas sensors prepared by pulsed laser deposition
Pulsed laser deposition (PLD) at room temperature with a nanosecond laser was used to prepare WO<sub>3</sub> layers on both MEMS microheater platforms and Si/SiO<sub>2</sub> substrates. Structural characterization showed that the layers are formed of nanoparticles and nanopar...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2016-04-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | http://www.j-sens-sens-syst.net/5/147/2016/jsss-5-147-2016.pdf |