Transparent Ferroelectric Capacitors on Glass

Transparent Ferroelectric Capacitors on Glass

We deposited transparent ferroelectric lead zirconate titanate thin films on fused silica and contacted them via Al-doped zinc oxide (AZO) transparent electrodes with an interdigitated electrode (IDE) design. These layers, together with a TiO2 buffer layer on the fused silica substrate, are highly t...

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Bibliographic Details
Main Authors: Daniele Sette, Stéphanie Girod, Renaud Leturcq, Sebastjan Glinsek, Emmanuel Defay
Format: Article
Language:English
Published: MDPI AG 2017-10-01
Series:Micromachines
Subjects:
transparent piezoelectrics
glass substrate
chemical solution deposition
Online Access:https://www.mdpi.com/2072-666X/8/10/313

Internet

https://www.mdpi.com/2072-666X/8/10/313

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