Highly Sensitive Photoacoustic Microcavity Gas Sensor for Leak Detection
A highly sensitive photoacoustic (PA) microcavity gas sensor for leak detection is proposed. The miniature and low-cost gas sensor mainly consisted of a micro-electro-mechanical system (MEMS) microphone and a stainless-steel capillary with two small holes opened on the side wall. Different from trad...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-02-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/4/1164 |