Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8

Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8

Pyrolytic carbon microelectrodes (PCMEs) are a promising alternative to their conventional metallic counterparts for various applications. Thus, methods for the simple and inexpensive patterning of PCMEs are highly sought after. Here, we demonstrate the fabrication of PCMEs through the selective pyr...

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Bibliographic Details
Main Authors: Emil Ludvigsen, Nina Ritter Pedersen, Xiaolong Zhu, Rodolphe Marie, David M. A. Mackenzie, Jenny Emnéus, Dirch Hjorth Petersen, Anders Kristensen, Stephan Sylvest Keller
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Micromachines
Subjects:
SU-8
pyrolysis
laser pyrolysis
direct laser writing
carbon
microelectrodes
Online Access:https://www.mdpi.com/2072-666X/12/5/564

Internet

https://www.mdpi.com/2072-666X/12/5/564

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