Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate
Optical waveguides are important for guiding lightwave from a place to other places. Propagation and insertion losses of the optical waveguides should be considered to be in low values. Recently, optical waveguides with circular structures, which are optical fibers, are used widely for guiding light...
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Indonesian Institute of Sciences
2017-12-01
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doaj-21166772135b4d8896b8f10b570d65bc2020-11-24T21:19:51ZengIndonesian Institute of SciencesJurnal Elektronika dan Telekomunikasi1411-82892527-99552017-12-01172364110.14203/jet.v17.36-41125Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon SubstrateDadin Mahmudin0Shobih -1Pamungkas Daud2Yusuf Nur Wijayanto3Indonesian Institute of SciencesIndonesian Institute of SciencesIndonesian Institute of SciencesIndonesian Institute of SciencesOptical waveguides are important for guiding lightwave from a place to other places. Propagation and insertion losses of the optical waveguides should be considered to be in low values. Recently, optical waveguides with circular structures, which are optical fibers, are used widely for guiding lightwave in long-distance optical communication with very low propagation and insertion losses. Simultaneously, optical waveguides with planar structure are also developed for short distance communication in optical devices. We have reported design and analysis of the planar optical waveguides. In this paper, fabrication of planar optical waveguides using a polyimide material on thin silicon dioxide combined with the silicon substrate is reported. The polyimide material is used for the core of the optical waveguides. The silicon dioxide located on the silicon substrate and the air is used for cladding of the optical waveguides. Fabrication of the optical waveguides such as oxidation, photoresist coating, masking, ultra-violet exposure, and etching was done. The fabricated optical waveguides were characterized physically using a standard microscope and scanning electron microscope (SEM). The fabrication processes and characterization results are reported and discussed in detail.http://www.jurnalet.com/jet/article/view/164optical waveguidepolyimidesilicon dioxidesilicon |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Dadin Mahmudin Shobih - Pamungkas Daud Yusuf Nur Wijayanto |
spellingShingle |
Dadin Mahmudin Shobih - Pamungkas Daud Yusuf Nur Wijayanto Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate Jurnal Elektronika dan Telekomunikasi optical waveguide polyimide silicon dioxide silicon |
author_facet |
Dadin Mahmudin Shobih - Pamungkas Daud Yusuf Nur Wijayanto |
author_sort |
Dadin Mahmudin |
title |
Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate |
title_short |
Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate |
title_full |
Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate |
title_fullStr |
Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate |
title_full_unstemmed |
Fabrication of Polyimide Optical Waveguide on Silicon Dioxide Layer Stacked Silicon Substrate |
title_sort |
fabrication of polyimide optical waveguide on silicon dioxide layer stacked silicon substrate |
publisher |
Indonesian Institute of Sciences |
series |
Jurnal Elektronika dan Telekomunikasi |
issn |
1411-8289 2527-9955 |
publishDate |
2017-12-01 |
description |
Optical waveguides are important for guiding lightwave from a place to other places. Propagation and insertion losses of the optical waveguides should be considered to be in low values. Recently, optical waveguides with circular structures, which are optical fibers, are used widely for guiding lightwave in long-distance optical communication with very low propagation and insertion losses. Simultaneously, optical waveguides with planar structure are also developed for short distance communication in optical devices. We have reported design and analysis of the planar optical waveguides. In this paper, fabrication of planar optical waveguides using a polyimide material on thin silicon dioxide combined with the silicon substrate is reported. The polyimide material is used for the core of the optical waveguides. The silicon dioxide located on the silicon substrate and the air is used for cladding of the optical waveguides. Fabrication of the optical waveguides such as oxidation, photoresist coating, masking, ultra-violet exposure, and etching was done. The fabricated optical waveguides were characterized physically using a standard microscope and scanning electron microscope (SEM). The fabrication processes and characterization results are reported and discussed in detail. |
topic |
optical waveguide polyimide silicon dioxide silicon |
url |
http://www.jurnalet.com/jet/article/view/164 |
work_keys_str_mv |
AT dadinmahmudin fabricationofpolyimideopticalwaveguideonsilicondioxidelayerstackedsiliconsubstrate AT shobih fabricationofpolyimideopticalwaveguideonsilicondioxidelayerstackedsiliconsubstrate AT pamungkasdaud fabricationofpolyimideopticalwaveguideonsilicondioxidelayerstackedsiliconsubstrate AT yusufnurwijayanto fabricationofpolyimideopticalwaveguideonsilicondioxidelayerstackedsiliconsubstrate |
_version_ |
1726004875225989120 |