Minimization of Energy Consumption for Chemicals Ultrapurification Processes
Semiconductor industry requires ultrapure chemicals to manufacture microelectronic devices. Hydrogen peroxide is one of the most demanded chemical by the semiconductor industry and ultrapurification processes are needed to achieve the electronic grade requirements for this chemical. Among all the ul...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIDIC Servizi S.r.l.
2012-09-01
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| Series: | Chemical Engineering Transactions |
| Online Access: | https://www.cetjournal.it/index.php/cet/article/view/7255 |