Electrostrictive microelectromechanical fibres and textiles
Micro-electromechanical systems fabrication techniques are based on silicon micromachining processes, resulting in rigid and low aspect ratio structures. Here the authors demonstrate a flexible, high aspect ratio micro-electromechanical system in fibre enabled by an electrostrictive ferrorelaxor ter...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2017-11-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-017-01558-5 |