A Finite Element Model of a MEMS-based Surface Acoustic Wave Hydrogen Sensor
Hydrogen plays a significant role in various industrial applications, but careful handling and continuous monitoring are crucial since it is explosive when mixed with air. Surface Acoustic Wave (SAW) sensors provide desirable characteristics for hydrogen detection due to their small size, low fabric...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2010-02-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/10/2/1232/ |