New Trends on MEMS Sensor Technology for Harsh Environment Applications
MEMS and NEMS sensor systems that can operate in the presence of high temperatures, corrosive media, and/or high radiation hold great promise for harsh environment applications. They would reduce weight, improve machine reliability and reduce cost in strategic market sectors such as automotive, avio...
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| Format: | Article |
| Language: | English |
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IFSA Publishing, S.L.
2007-10-01
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| Series: | Sensors & Transducers |
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| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_07/P_SI_7.pdf |