Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

• Main Authors: Zilong Zhang, Yuanzhao Wu, Liwen Sang, Haihua Wu, Jian Huang, Linjun Wang, Yukiko Takahashi, Runwei Li, Satoshi Koizumi, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Meiyong Liao
• Format: Article
• Language: English
• Published: Taylor & Francis Group 2020-05-01
• Series: Materials Research Letters
• Subjects: single-crystal diamond; galfenol (fega); magnetostrictive effect; mems
• Online Access: http://dx.doi.org/10.1080/21663831.2020.1734680

Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of ~4nT/√Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones.