Nanochip: a MEMS-Based Ultra-High Data Density Memory Device

Nanochip: a MEMS-Based Ultra-High Data Density Memory Device

he paper provides an overview of successful development of MEMS micro-mover with large range of motion and an array of cantilevers with sharp tips (read-write heads) for a probe storage device. Approaches used for integration of memory material into the MEMS process and integration of MEMS cantileve...

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Bibliographic Details
Main Authors: Nickolai BELOV, Donald ADAMS, Тsung-Kuan CHOU, John HECK, Byong KIM, Gordon KNIGHT, Qing MA, Valluri RAO, Jong-Seung PARK, Robert STARK, Ghassan TCHELEPI
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2009-10-01
Series:Sensors & Transducers
Subjects:
Probe storage
CMOS-MEMS integration
Micro-mover
Cantilevers
Electromagnetic actuator
Electrostatic actuator
Online Access:http://www.sensorsportal.com/HTML/DIGEST/october_09/P_SI_82.pdf

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http://www.sensorsportal.com/HTML/DIGEST/october_09/P_SI_82.pdf

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