Nanochip: a MEMS-Based Ultra-High Data Density Memory Device
he paper provides an overview of successful development of MEMS micro-mover with large range of motion and an array of cantilevers with sharp tips (read-write heads) for a probe storage device. Approaches used for integration of memory material into the MEMS process and integration of MEMS cantileve...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2009-10-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_09/P_SI_82.pdf |