Superjunction LDMOS With Dual Gate for Low On-Resistance and High Transconductance
In this paper, a novel bulk silicon lateral superjunction double diffused MOSFET (SJ-LDMOS) with dual gate (DG) is proposed and its mechanism is investigated by numerical TCAD simulations. The proposed structure features the combination of a trench gate and a planar gate, forming two current conduct...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2020-01-01
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Series: | IEEE Journal of the Electron Devices Society |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9148601/ |