Formation and Dissolution of Mesoporous Layer during Metal-Particle-Assisted Etching of n-Type Silicon

Metal-assisted etching has attracted increasing attention as a method to produce porous silicon (Si). We previously found that gold (Au)-particle-assisted etching and platinum (Pt)-particle-assisted etching cause general corrosion of the Si substrate, but not in the case of silver (Ag)-particle-assi...

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Bibliographic Details
Main Authors: Ayumu MATSUMOTO, Keishi IWAMOTO, Yuki SHIMADA, Kyohei FURUKAWA, Shun MAJIMA, Shinji YAE
Format: Article
Language:English
Published: The Electrochemical Society of Japan 2021-03-01
Series:Electrochemistry
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/electrochemistry/89/2/89_20-65159/_pdf/-char/en