Study of Birefringence and Stress Distribution of SiO<sub>2</sub> Film Optical Waveguide on Silicon Wafer
Silica waveguide planar lightwave circuit (PLC) technology is driving the broad applications of various functional components to meet the increasing demands of the industry due to its advanced performance in large-scale wafer mass production. Despite the intense research interests in understanding a...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-05-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/9/5/316 |