Tunable diameter and spacing of double Ge quantum dots using highly-controllable spacers and selective oxidation of SiGe
Abstract We report the novel tunability of the diameters and spacings of paired Ge double quantum dots (DQDs) using nano-spacer technology in combination with selective oxidation of Si0.85Ge0.15 at high temperature. Pairs of spherical-shaped Ge QDs were formed by the selective oxidation of poly-SiGe...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2019-08-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-019-47806-0 |