Si Nanocrystals Embedded in a Silicon Oxynitride Matrix

Si Nanocrystals Embedded in a Silicon Oxynitride Matrix

We investigated the morphological and structural change in silicon nanostructures embedded in the silicon oxynitride matrix. The study has been carried out on thin films thermally annealed at high temperature, after deposition at 400°C by Electron Cyclotron Resonance Plasma Enhanced Chemical...

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Bibliographic Details
Main Authors: Abdelillah Slaoui, Marzia Carrada, Gérald Ferblantier, Lorenzo Morresi, Nicola Pinto, Marco Ficcadenti
Format: Article
Language:English
Published: SAGE Publishing 2011-10-01
Series:Nanomaterials and Nanotechnology
Subjects:
Silicon
nanocrystals
nanocolumns
silicon oxynitride
Online Access:http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/si_nanocrystals_embedded_in_a_silicon_oxynitride_matrix

Internet

http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/si_nanocrystals_embedded_in_a_silicon_oxynitride_matrix

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