Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement

Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement

This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic wet etching was employed to form a standard pyramidal microtip array and HF/HNO3 isotropic etching was used to fabricate barbs on these microtips. To improve the electrical conductanc...

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Bibliographic Details
Main Authors: Li-Sheng Hsu, Shu-Wei Tung, Che-Hsi Kuo, Yao-Joe Yang
Format: Article
Language:English
Published: MDPI AG 2014-07-01
Series:Sensors
Subjects:
barbed microtips
contact impedance
detaching force
dry electrode
electrocardiography (ECG)
electroencephalogram (EEG)
silicon wet etching
Online Access:http://www.mdpi.com/1424-8220/14/7/12370

Internet

http://www.mdpi.com/1424-8220/14/7/12370

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