Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process
Multi-vibrational-mode electrostatic energy harvesters are designed and micro-machined utilizing a simple silicon-on-insulator (SOI) wafer-based process. Enhanced adaptability to various vibrational environments is achieved in the proposed design by using serpentine springs attached to the fishbone-...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/8/2/51 |