RF Magnetron Sputtering Deposition of TiO<sub>2</sub> Thin Films in a Small Continuous Oxygen Flow Rate
Rutile titanium oxide (TiO<sub>2</sub>) thin films require more energy to crystallize than the anatase phase of TiO<sub>2</sub>. It is a prime candidate for micro-optoelectronics and is usually obtained either by high substrate temperature, applying a substrate bias, pulsed g...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-07-01
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Series: | Coatings |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-6412/9/7/442 |