Position Estimator Design for a MEMS Top-Drive Electrostatic Rotary Actuator
The capacitance and rotor angle of a MEMS top-drive electrostatic rotary actuator do not have a linear relationship due to the non-ignorable fringe effect and low aspect ratio of the electrodes. Therefore, the position estimation is not as straightforward as that for a comb-drive linear actuator or...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-12-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/24/7081 |