Microplasma microphones
It is shown experimentally that a microplasma created by a microstructured electrode array is sensitive to sound pressure. In this paper, two electrode architectures are used to create the microplasma. The sensitivity of these microplasma microphones, close to 0.4 nA/Pa, is estimated using a wavegui...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2021-01-01
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| Series: | Acta Acustica |
| Subjects: | |
| Online Access: | https://acta-acustica.edpsciences.org/articles/aacus/full_html/2021/01/aacus210011/aacus210011.html |