Formation of uniform high-density and small-size Ge/Si quantum dots by scanning pulsed laser annealing of pre-deposited Ge/Si film
The capability to fabricate Ge/Si quantum dots with small dot size and high dot density uniformly over a large area is crucial for many applications. In this work, we demonstrate that this can be achieved by scanning a pre-deposited Ge thin layer on Si substrate with a line-focused pulsed laser beam...
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doaj-8358583e951240109825b4935a034f612020-11-24T21:58:20ZengAIP Publishing LLCAIP Advances2158-32262016-05-0165055323055323-1110.1063/1.4953057088605ADVFormation of uniform high-density and small-size Ge/Si quantum dots by scanning pulsed laser annealing of pre-deposited Ge/Si filmHamza Qayyum0Chieh-Hsun Lu1Ying-Hung Chuang2Jiunn-Yuan Lin3Szu-yuan Chen4Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei 106, TaiwanInstitute of Atomic and Molecular Sciences, Academia Sinica, Taipei 106, TaiwanInstitute of Atomic and Molecular Sciences, Academia Sinica, Taipei 106, TaiwanDepartment of Physics, National Chung Cheng University, Chiayi 621, TaiwanInstitute of Atomic and Molecular Sciences, Academia Sinica, Taipei 106, TaiwanThe capability to fabricate Ge/Si quantum dots with small dot size and high dot density uniformly over a large area is crucial for many applications. In this work, we demonstrate that this can be achieved by scanning a pre-deposited Ge thin layer on Si substrate with a line-focused pulsed laser beam to induce formation of quantum dots. With suitable setting, Ge/Si quantum dots with a mean height of 2.9 nm, a mean diameter of 25 nm, and a dot density of 6×1010 cm−2 could be formed over an area larger than 4 mm2. The average size of the laser-induced quantum dots is smaller while their density is higher than that of quantum dots grown by using Stranski-Krastanov growth mode. Based on the dependence of the characteristics of quantum dots on the laser parameters, a model consisting of laser-induced strain, surface diffusion, and Ostwald ripening is proposed for the mechanism underlying the formation of the Ge/Si quantum dots. The technique demonstrated could be applicable to other materials besides Ge/Si.http://dx.doi.org/10.1063/1.4953057 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Hamza Qayyum Chieh-Hsun Lu Ying-Hung Chuang Jiunn-Yuan Lin Szu-yuan Chen |
spellingShingle |
Hamza Qayyum Chieh-Hsun Lu Ying-Hung Chuang Jiunn-Yuan Lin Szu-yuan Chen Formation of uniform high-density and small-size Ge/Si quantum dots by scanning pulsed laser annealing of pre-deposited Ge/Si film AIP Advances |
author_facet |
Hamza Qayyum Chieh-Hsun Lu Ying-Hung Chuang Jiunn-Yuan Lin Szu-yuan Chen |
author_sort |
Hamza Qayyum |
title |
Formation of uniform high-density and small-size Ge/Si quantum dots by scanning pulsed laser annealing of pre-deposited Ge/Si film |
title_short |
Formation of uniform high-density and small-size Ge/Si quantum dots by scanning pulsed laser annealing of pre-deposited Ge/Si film |
title_full |
Formation of uniform high-density and small-size Ge/Si quantum dots by scanning pulsed laser annealing of pre-deposited Ge/Si film |
title_fullStr |
Formation of uniform high-density and small-size Ge/Si quantum dots by scanning pulsed laser annealing of pre-deposited Ge/Si film |
title_full_unstemmed |
Formation of uniform high-density and small-size Ge/Si quantum dots by scanning pulsed laser annealing of pre-deposited Ge/Si film |
title_sort |
formation of uniform high-density and small-size ge/si quantum dots by scanning pulsed laser annealing of pre-deposited ge/si film |
publisher |
AIP Publishing LLC |
series |
AIP Advances |
issn |
2158-3226 |
publishDate |
2016-05-01 |
description |
The capability to fabricate Ge/Si quantum dots with small dot size and high dot density uniformly over a large area is crucial for many applications. In this work, we demonstrate that this can be achieved by scanning a pre-deposited Ge thin layer on Si substrate with a line-focused pulsed laser beam to induce formation of quantum dots. With suitable setting, Ge/Si quantum dots with a mean height of 2.9 nm, a mean diameter of 25 nm, and a dot density of 6×1010 cm−2 could be formed over an area larger than 4 mm2. The average size of the laser-induced quantum dots is smaller while their density is higher than that of quantum dots grown by using Stranski-Krastanov growth mode. Based on the dependence of the characteristics of quantum dots on the laser parameters, a model consisting of laser-induced strain, surface diffusion, and Ostwald ripening is proposed for the mechanism underlying the formation of the Ge/Si quantum dots. The technique demonstrated could be applicable to other materials besides Ge/Si. |
url |
http://dx.doi.org/10.1063/1.4953057 |
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