Nanostructures of ITO Thin Films Induced by Low Energy Ion Beam
This paper presents a novel method that using low energy hydrogen ion beam at normal incidence to deal with indium tin oxide(ITO) thin films.The surface structure of ITO thin films are controlled by changing parameters of ion source(IS),such as ion energy,ion beam current,substrate temperature and p...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2016-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20166702008 |