Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition

Double layered stacks of ZrO<sub>2</sub> and SnO<sub>2</sub> films, aiming at the synthesis of thin magnetic and elastic material layers, were grown by atomic layer deposition to thicknesses in the range of 20–25 nm at 300 °C from ZrCl<sub>4</sub>, SnI<sub>4...

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Main Authors: Aile Tamm, Helle-Mai Piirsoo, Taivo Jõgiaas, Aivar Tarre, Joosep Link, Raivo Stern, Kaupo Kukli
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/11/7/1633
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spelling doaj-8c98bc7c8ce34b10b9d859fe9e00c5912021-07-23T13:57:09ZengMDPI AGNanomaterials2079-49912021-06-01111633163310.3390/nano11071633Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer DepositionAile Tamm0Helle-Mai Piirsoo1Taivo Jõgiaas2Aivar Tarre3Joosep Link4Raivo Stern5Kaupo Kukli6Institute of Physics, University of Tartu, W. Ostwaldi 1, 50411 Tartu, EstoniaInstitute of Physics, University of Tartu, W. Ostwaldi 1, 50411 Tartu, EstoniaInstitute of Physics, University of Tartu, W. Ostwaldi 1, 50411 Tartu, EstoniaInstitute of Physics, University of Tartu, W. Ostwaldi 1, 50411 Tartu, EstoniaLaboratory of Chemical Physics, National Institute of Chemical Physics and Biophysics, Akadeemia tee 23, 12618 Tallinn, EstoniaLaboratory of Chemical Physics, National Institute of Chemical Physics and Biophysics, Akadeemia tee 23, 12618 Tallinn, EstoniaInstitute of Physics, University of Tartu, W. Ostwaldi 1, 50411 Tartu, EstoniaDouble layered stacks of ZrO<sub>2</sub> and SnO<sub>2</sub> films, aiming at the synthesis of thin magnetic and elastic material layers, were grown by atomic layer deposition to thicknesses in the range of 20–25 nm at 300 °C from ZrCl<sub>4</sub>, SnI<sub>4</sub>, H<sub>2</sub>O, and O<sub>3</sub> as precursors. The as-deposited nanostructures consisted of a metastable tetragonal polymorph of ZrO<sub>2</sub>, and a stable tetragonal phase of SnO<sub>2</sub>, with complementary minor reflections from the orthorhombic polymorph of SnO<sub>2</sub>. The hardness and elastic modulus of the stacks depended on the order of the constituent oxide films, reaching 15 and 171 GPa, respectively, in the case of top SnO<sub>2</sub> layers. Nonlinear saturative magnetization could be induced in the stacks with coercive fields up to 130 Oe.https://www.mdpi.com/2079-4991/11/7/1633atomic layer depositionnanostructuresmagnetizationnanoindentationtin dioxidezirconium dioxide
collection DOAJ
language English
format Article
sources DOAJ
author Aile Tamm
Helle-Mai Piirsoo
Taivo Jõgiaas
Aivar Tarre
Joosep Link
Raivo Stern
Kaupo Kukli
spellingShingle Aile Tamm
Helle-Mai Piirsoo
Taivo Jõgiaas
Aivar Tarre
Joosep Link
Raivo Stern
Kaupo Kukli
Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition
Nanomaterials
atomic layer deposition
nanostructures
magnetization
nanoindentation
tin dioxide
zirconium dioxide
author_facet Aile Tamm
Helle-Mai Piirsoo
Taivo Jõgiaas
Aivar Tarre
Joosep Link
Raivo Stern
Kaupo Kukli
author_sort Aile Tamm
title Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition
title_short Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition
title_full Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition
title_fullStr Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition
title_full_unstemmed Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition
title_sort mechanical and magnetic properties of double layered nanostructures of tin and zirconium oxides grown by atomic layer deposition
publisher MDPI AG
series Nanomaterials
issn 2079-4991
publishDate 2021-06-01
description Double layered stacks of ZrO<sub>2</sub> and SnO<sub>2</sub> films, aiming at the synthesis of thin magnetic and elastic material layers, were grown by atomic layer deposition to thicknesses in the range of 20–25 nm at 300 °C from ZrCl<sub>4</sub>, SnI<sub>4</sub>, H<sub>2</sub>O, and O<sub>3</sub> as precursors. The as-deposited nanostructures consisted of a metastable tetragonal polymorph of ZrO<sub>2</sub>, and a stable tetragonal phase of SnO<sub>2</sub>, with complementary minor reflections from the orthorhombic polymorph of SnO<sub>2</sub>. The hardness and elastic modulus of the stacks depended on the order of the constituent oxide films, reaching 15 and 171 GPa, respectively, in the case of top SnO<sub>2</sub> layers. Nonlinear saturative magnetization could be induced in the stacks with coercive fields up to 130 Oe.
topic atomic layer deposition
nanostructures
magnetization
nanoindentation
tin dioxide
zirconium dioxide
url https://www.mdpi.com/2079-4991/11/7/1633
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