Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition

Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition

Double layered stacks of ZrO<sub>2</sub> and SnO<sub>2</sub> films, aiming at the synthesis of thin magnetic and elastic material layers, were grown by atomic layer deposition to thicknesses in the range of 20–25 nm at 300 °C from ZrCl<sub>4</sub>, SnI<sub>4...

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Bibliographic Details
Main Authors: Aile Tamm, Helle-Mai Piirsoo, Taivo Jõgiaas, Aivar Tarre, Joosep Link, Raivo Stern, Kaupo Kukli
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Nanomaterials
Subjects:
atomic layer deposition
nanostructures
magnetization
nanoindentation
tin dioxide
zirconium dioxide
Online Access:https://www.mdpi.com/2079-4991/11/7/1633

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