An Integrated ISFET Sensor Array
A monolithically integrated ISFET sensor array and interface circuit are described. A new high-density, low-power source-drain follower was developed for the sensor array. ISFETs were formed by depositing Au/Ti extended-gate electrodes on standard MOSFETs, then thin silicon nitride layers using cata...
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| Format: | Article |
| Language: | English |
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MDPI AG
2009-11-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/9/11/8831/ |