Analytical modeling of mechanical behavior of structures: Comparative analysis, experimental validation and numerical correction with FEM of material defects generated by anisotropic etching
This paper presented semi-analytical approach in order to investigate the influence of manufacturing process defects on the elasticity of thin microbeam. The Rayleigh Beam Model (RBM) will be analyzed and corrected using 3D FEM scripts including the effects of the cross-section shape and the under-...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2014-06-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20141204002 |