Optical Monitoring of the Production Quality of Si-Nanoribbon Chips Intended for the Detection of ASD-Associated Oligonucleotides

Optical Monitoring of the Production Quality of Si-Nanoribbon Chips Intended for the Detection of ASD-Associated Oligonucleotides

Gas-phase etching and optical lithography were employed for the fabrication of a silicon nanoribbon chip (Si-NR chip). The quality of the so-fabricated silicon nanoribbons (Si-NRs) was monitored by optical Raman scattering spectroscopy. It was demonstrated that the structures of the Si-NRs were virt...

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Bibliographic Details
Main Authors: Kristina A. Malsagova, Tatyana O. Pleshakova, Vladimir P. Popov, Igor N. Kupriyanov, Rafael A. Galiullin, Andrey F. Kozlov, Ivan D. Shumov, Anna L. Kaysheva, Fedor V. Tikhonenko, Alexander I. Archakov, Yuri D. Ivanov
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Micromachines
Subjects:
autism spectrum disorders
microRNA
silicon nanoribbon
sensor chip
DNA oligonucleotides
Raman spectroscopy
Online Access:https://www.mdpi.com/2072-666X/12/2/147

Internet

https://www.mdpi.com/2072-666X/12/2/147

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