Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled together using suspension beams. The 1-DOF system co...

Full description

Bibliographic Details
Main Authors: Muhammad Saqib, Muhammad Mubasher Saleem, Naveed Mazhar, Saif Ullah Awan, Umar Shahbaz Khan
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Micromachines
Subjects:
MEMS gyroscope
electro-thermal actuator
non-resonant
multi-DOF
high gain
capacitive sensing
robustness
Online Access:https://www.mdpi.com/2072-666X/9/11/577

Internet

https://www.mdpi.com/2072-666X/9/11/577

Similar Items