Preparation and Characterization of Sprayed-Yttrium Oxyfluoride Corrosion Protective Coating for Plasma Process Chambers
This study investigates the microstructure, mechanical and electrical properties of dense yttrium oxyfluoride (YOF) coatings fabricated by the atmospheric plasma spraying technique. Transmission electron microscopy and X-ray diffraction analysis revealed a well crystallized YOF coating with preferre...
Main Authors: | Tzu-Ken Lin, Dong-Sing Wuu, Shih-Yung Huang, Wei-Kai Wang |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-10-01
|
Series: | Coatings |
Subjects: | |
Online Access: | http://www.mdpi.com/2079-6412/8/10/373 |
Similar Items
-
Yttrium Oxyfluoride Coatings Deposited by Suspension Plasma Spraying Using Coaxial Feeding
by: Jaehoo Lee, et al.
Published: (2020-05-01) -
Effect of the Dispersion State in Y<sub>5</sub>O<sub>4</sub>F<sub>7</sub> Suspension on YOF Coating Deposited by Suspension Plasma Spray
by: Seungjun Lee, et al.
Published: (2021-07-01) -
Contamination Particles and Plasma Etching Behavior of Atmospheric Plasma Sprayed Y<sub>2</sub>O<sub>3</sub> and YF<sub>3</sub> Coatings under NF<sub>3</sub> Plasma
by: Je-Boem Song, et al.
Published: (2019-02-01) -
Plasma Etching Behavior of SF<sub>6</sub> Plasma Pre-Treatment Sputter-Deposited Yttrium Oxide Films
by: Wei-Kai Wang, et al.
Published: (2020-06-01) -
Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings
by: Tzu-Ken Lin, et al.
Published: (2017-07-01)