Towards High Extinction Ratio in Silicon Thermo-Optic Switches—Unravelling Complexity of Fabrication Variation
2 × 2 Mach-Zehnder thermo-optic switches on silicon are found to exhibit huge difference of extinction ratios between the bar and cross port, with the bar port lower by up to 20 dB. Device physics analysis shows that this can be explained by synchronous variation of the splitting ratios o...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
IEEE
2018-01-01
|
Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/8413077/ |