Editorial for the Special Issue on Piezoelectric MEMS

Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in micro-electromechanical systems (MEMS) either as substrates or as thin films[...]

Bibliographic Details
Main Authors: Ulrich Schmid, Michael Schneider
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Micromachines
Subjects:
n/a
Online Access:http://www.mdpi.com/2072-666X/9/5/237