Editorial for the Special Issue on Piezoelectric MEMS
Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in micro-electromechanical systems (MEMS) either as substrates or as thin films[...]
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/9/5/237 |