An Inchworm Type Piezoelectric Actuator Working in Resonant State

An inchworm type piezoelectric actuator with four driving feet is proposed and tested. The proposed actuator has merits of easy fabrication and miniaturization structure by using a boned-type structure. Horizontal vibration mode and vertical vibration mode are produced synchronously with a certain t...

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Bibliographic Details
Main Authors: Xinqi Tian, Qiquan Quan, Liang Wang, Qi Su
Format: Article
Language:English
Published: IEEE 2018-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8310647/