An Inchworm Type Piezoelectric Actuator Working in Resonant State
An inchworm type piezoelectric actuator with four driving feet is proposed and tested. The proposed actuator has merits of easy fabrication and miniaturization structure by using a boned-type structure. Horizontal vibration mode and vertical vibration mode are produced synchronously with a certain t...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
IEEE
2018-01-01
|
Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/8310647/ |