Junctionless Silicon Nanowire Resonator
The development of nanoelectromechanical systems (NEMS) is likely to open up a broad spectrum of applications in science and technology. In this paper, we demonstrate a novel double-transduction principle for silicon nanowire resonators, which exploits the depletion charge modulation in a junctionle...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2014-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/6687248/ |