GROWN AND SUBSTRUCTURE OF LITHIUM NIOBATE FILMS
Objective. Radio frequency magnetron sputtering (RFMS) is one of the most promising methods of synthesis of lithium niobate fi lms. It is known that RFMS conditions (the composition and the pressure of the working gas and the power and the spatial inhomogeneity of plasma discharge) offer great oppor...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2019-03-01
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| Series: | Конденсированные среды и межфазные границы |
| Subjects: |