Exploiting Direct Laser Writing for Hydrogel Integration into Fragile Microelectromechanical Systems

The integration of chemo-responsive hydrogels into fragile microelectromechanical systems (MEMS) with reflective surfaces in the micron to submicron range is presented. Direct laser writing (DLW) for 3D microstructuring of chemoresponsive “smart” hydrogels on sensitive microstruc...

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Bibliographic Details
Main Authors: Julian Menges, Steffen Klingel, Egbert Oesterschulze, Hans-Jörg Bart
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/19/11/2494