A Piezoelectric Micromachined Ultrasound Transducers (pMUT) Array, for Wide Bandwidth Underwater Communication Applications

A Piezoelectric Micromachined Ultrasound Transducers (pMUT) Array, for Wide Bandwidth Underwater Communication Applications

This paper presents an array of five aluminum nitride (AlN) based piezoelectric micromachined ultrasound transducers (pMUTs) with different dimensions operating at 540–2360 kHz in air. Due to the damping effect of water or oil on the vibration of each individual pMUT, their frequency response tends...

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Bibliographic Details
Main Authors: Sina Sadeghpour, Paulius Pobedinskas, Ken Haenen, Robert Puers
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
aluminum nitride (AlN)
piezoelectric micromachined ultrasound transducer (pMUT)
deep reactive ion etching (DRIE)
laser doppler vibrometer (LDV)
X-ray diffractometer (XRD)
Online Access:https://www.mdpi.com/2504-3900/1/4/364

Internet

https://www.mdpi.com/2504-3900/1/4/364

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