Influence of composition on structure, morphology and dielectric properties of BixAlyOz composite films synthesized by atomic layer deposition
In this experiment we used atomic layer deposited Bi2O3 and Al2O3 films to fabricate the BixAlyOz nanocomposite films. Bismuth composition was modulated in a series of samples via altering the number of bismuth subsidiary cycles. We discovered that the bismuth composition in atomic percent did not m...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4982728 |