Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury

• Main Authors: Huicong Liu, Jiangjun Geng, Qifeng Zhu, Lue Zhang, Fengxia Wang, Tao Chen, Lining Sun
• Format: Article
• Language: English
• Published: MDPI AG 2019-12-01
• Series: Sensors
• Subjects: piezoelectric; micromachined; flexible substrate; ultrasonic transducer array
• Online Access: https://www.mdpi.com/1424-8220/20/1/86

Flexible electronic devices are developing rapidly, especially in medical applications. This paper reports an arrayed flexible piezoelectric micromachined ultrasonic transducer (FPMUT) with a sandwich structure for adjuvant treatment of bone injury. To make the device conformable and stretchable for attaching to the skin surface, the flexible substrate of polydimethylsiloxane (PDMS) was combined with the flexible metal line interconnection between the bulk lead zirconate titanate (PZT) arrays. Simulations and experiments were carried out to verify the resonant frequency and tensile property of the reported FPMUT device. The device had a resonant frequency of 321.15 KHz and a maximum sound pressure level (SPL) of 180.19 dB at the distance of 5 cm in water. In addition, detailed experiments were carried out to test its acoustic performance with different pork tissues, and the results indicated good ultrasound penetration. These findings confirm that the FPMUT shows unique advantages for adjuvant treatment of bone injury.