%0 Article %A Kapil Debnath %I Frontiers Media S.A. %D 2016 %G English %B Frontiers in Materials %@ 2296-8016 %T Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching %U http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00051/full %X We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides.