Sensitivity and Directivity Analysis of Piezoelectric Ultrasonic CantileverBased MEMS Hydrophone for Underwater Applications

Sensitivity and Directivity Analysis of Piezoelectric Ultrasonic CantileverBased MEMS Hydrophone for Underwater Applications

In this paper, we report on the characterization of the sensitivity and the directionality of a novel ultrasonic hydrophone fabricated by microelectromechanical systems (MEMS) process, using aluminum nitride (AlN) thin film as piezoelectric functional layer and exploiting a stress-driven design. Hyd...

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Bibliographic Details
Main Authors: Basit Abdul, Vincenzo Mariano Mastronardi, Antonio Qualtieri, Luciana Algieri, Francesco Guido, Francesco Rizzi, Massimo De Vittorio
Format: Article
Language:English
Published: MDPI AG 2020-10-01
Series:Journal of Marine Science and Engineering
Subjects:
MEMS
AlN
stress
piezoelectricity
hydrophone
sensitivity
Online Access:https://www.mdpi.com/2077-1312/8/10/784

Internet

https://www.mdpi.com/2077-1312/8/10/784

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