RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina

RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina

Today, using of nanostructured materials in microelectromechanical systems (MEMS) is very perspective. One of such materials is anodic aluminum oxide that has electrical and mechanical properties not worse than other materials that are currently used in manufacturing of MEMS devices. This article pr...

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Main Authors: S. A. Biran, D. A. Korotkevich, A. V. Korotkevich
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
anodic aluminum oxide
nanostructured materials
young's modulus
Online Access:https://doklady.bsuir.by/jour/article/view/804
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spelling doaj-d5643bb17757436bb8397cdcc8e81e142021-07-28T16:19:50ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-0107380382803RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic aluminaS. A. Biran0D. A. Korotkevich1A. V. Korotkevich2Белорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиToday, using of nanostructured materials in microelectromechanical systems (MEMS) is very perspective. One of such materials is anodic aluminum oxide that has electrical and mechanical properties not worse than other materials that are currently used in manufacturing of MEMS devices. This article presents the results of research in methodology and measurement of Young's modulus of free aluminum oxide films.https://doklady.bsuir.by/jour/article/view/804anodic aluminum oxidenanostructured materialsyoung's modulus
collection DOAJ
language Russian
format Article
sources DOAJ
author S. A. Biran
D. A. Korotkevich
A. V. Korotkevich
spellingShingle S. A. Biran
D. A. Korotkevich
A. V. Korotkevich
RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
anodic aluminum oxide
nanostructured materials
young's modulus
author_facet S. A. Biran
D. A. Korotkevich
A. V. Korotkevich
author_sort S. A. Biran
title RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina
title_short RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina
title_full RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina
title_fullStr RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina
title_full_unstemmed RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina
title_sort research on mechanical properties of mems components based on anodic alumina
publisher Educational institution «Belarusian State University of Informatics and Radioelectronics»
series Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
issn 1729-7648
publishDate 2019-06-01
description Today, using of nanostructured materials in microelectromechanical systems (MEMS) is very perspective. One of such materials is anodic aluminum oxide that has electrical and mechanical properties not worse than other materials that are currently used in manufacturing of MEMS devices. This article presents the results of research in methodology and measurement of Young's modulus of free aluminum oxide films.
topic anodic aluminum oxide
nanostructured materials
young's modulus
url https://doklady.bsuir.by/jour/article/view/804
work_keys_str_mv AT sabiran researchonmechanicalpropertiesofmemscomponentsbasedonanodicalumina
AT dakorotkevich researchonmechanicalpropertiesofmemscomponentsbasedonanodicalumina
AT avkorotkevich researchonmechanicalpropertiesofmemscomponentsbasedonanodicalumina
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