TECHNOLOGY AND MEASUREMENTS OF MAGNETORESISTANCE IN THIN-LAYERED FERROMAGNETIC STRUCTURES
The paper presents the technology for obtaining NiFe/Ti/NiFe layer structures in MEMS technology using magnetron purge with the assumption of being used as semi-magnetic sensors. A series of samples was made on a glass substrate with a sandwich structure, where the individual layers were 100 nm NiF...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Lublin University of Technology
2020-03-01
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| Series: | Informatyka, Automatyka, Pomiary w Gospodarce i Ochronie Środowiska |
| Subjects: | |
| Online Access: | https://ph.pollub.pl/index.php/iapgos/article/view/896 |