Design and optimization of differential capacitive micro accelerometer for vibration measurement
This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity e...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2021-05-01
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| Series: | Journal of the Mechanical Behavior of Materials |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/jmbm-2021-0003 |